What is the best filtration for a slurry? | CMP Library
In this sense, it is "absolute" for Pall (Beta ratio of 5000), very good for Entegris (LRV of 3.7) and for other filter suppliers (99.98% retention). The same filter, when tested with Cabot iCUE 5306 Copper slurry (Alumina particles) removes 92% of these particles in the same channel. The same filter, when tested with Cabot SS12 Oxide …